Abstract
TiCrAlN and CrTiAlN multicomponent coatings have been developed using closed-field unbalanced magnetron sputtering technique (CFUBMS) in a gas mixture of Ar + N2. The nitrogen level was varied by using the feedback control of plasma optical emission monitor (OEM). An investigation into the effect of the CFUBMS process parameters on the properties of the coatings was undertaken. The main coatings parameters such as thickness, surface morphology, nanohardness, strength of adhesion and wear resistance were studied by means of ball-cratering method, atomic force microscopy, scanning electron microscopy, scratch tests and nanoindentation measurements. The study revealed strong dependency of the mechanical properties on the nitrogen flow rate. Analysis of the experimental results showed that Cr-based multicomponent coatings possess better mechanical properties than Ti-based coatings at a nitrogen flow rate of 21 sccm: higher value of hardness (≤ 31GPa) and higher scratch resistance (> 30 N).
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