Effects of racetrack magnetic field strength on structure and properties of amorphous carbon coatings deposited by HiPIMS using deep oscillation pulses

Abstract

In this study, non‑hydrogenated diamond like carbon (DLC) coatings were deposited by sputtering a graphite target in argon (Ar) by high power impulse magnetron sputtering (HiPIMS) using deep oscillation pulses. The effects of the magnetic field strength (B) tangential to surface of the target racetrack on the deposition parameters were studied. The structure, adhesion, and mechanical properties of DLC coatings deposited at different B were investigated by scanning electron microscopy (SEM), Raman spectroscopy, atomic force microscopy (AFM), scratch test, and nanoindentation. The tribological properties of the DLC coatings were evaluated using ball on disk wear test under dry and lubricated test conditions. It was found that the peak target current and substrate current density increased as B increased due to the enhanced electron confinement which results in an increased ionization efficiency. The enhanced ion bombardment was beneficial for improving the structure and properties of DLC coatings. As B increased, the DLC coatings exhibited more compact structure, smaller carbon mounds, and higher sp3 bond fractions. The improvement of the microstructure of the DLC coatings contributed to improved hardness and wear resistance of the coatings in both dry and lubricated test conditions. However, the deposition rate decreased at higher B owing to the high probability of back-attraction of carbon ions. The results suggested that controlling B in the range of 600 G to 700 G is important for achieving fully dense structure, high sp3 bond fractions, and high hardness for the DLC coatings deposited using HiPIMS. A further increase in B to 850 G showed no significant changes in the magnetic field induced effects on the structure and properties of the coatings.