Abstract
The microhardness of a thin aluminum oxide film with a thickness of 80 to 240 nm on the surface of a lithium niobate single crystal was determined by the method of nanoindentation. The hardness and Young’s modulus for a film deposited by dc-magnetron sputtering of an aluminum target in a gas (Ar+O2) medium were more than 30 GPa and 300 GPa, respectively. The dependences of the film thickness on the mechanical properties of a layered system, in particular hardness and elastic modulus, were established.
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