Abstract
The unique aspect of Ionized Cluster Beam (ICB) thin film deposition is that material is deposited in the form of ionized, accelerated atom clusters. Unique film properties have been reported for ICB, including high surface adhesion, low temperature epitaxy, and minimal surface damage. The cluster size in much of the early work was not measured directly but was inferred from theory including the following: (1) Thermodynamic description of beam generation using a nozzle source; (2) cluster embryo formation and subsequent growth due to collisions; (3) scaling laws based on gas dynamics; (4) classical nucleation theory coupled with gas flow equations; (5) classical nucleation theory with time dependence; and (6) condensation of vapor atoms on crucible walls, surface migration to form embryos, and establishment of bonds between atoms and embryos. These theories do predict the formation of clusters using a nozzle source even though they are not in complete agreement and have their detractors. Consequently the ...
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
