Abstract
The features of linear simulators with beam-plasma discharge are examined. A description of five discharge modes is provided. They can be implemented in such devices, depending on working-gas pressure, operating parameters of the electron gun and collecting electrode: vacuum beam transport, diffuse discharge, beam-plasma discharge, vacuum arc and self-oscillating modes. We describe how to use these modes in combination with diagnostics methods and sample holders, which allow studies of thermal and plasma loading, thermal cycling, sputtering, redeposition, gas capture, cleaning of deposited layers, development of instabilities, and ion etching.
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