Abstract
Based on dependences that describe the nonstationary temperature fields in the membrane and casing of the tensoresistive pressure sensor, we derived equations for thermomechanical processes in these elements, specifically equations of thermal deformation and thermal stresses. These equations make it possible to explore the effect of a thermal deflection in the membrane, as well as thermal stresses and thermal deformations in it, on the static and dynamic characteristics of the sensor. It is shown that the combination of thermal elastic processes in the membrane under a fast-changing effect of temperature on it significantly distorts the static and dynamic characteristics. It was established that during thermal deflection relative deformations on the surface of the membrane can be commensurate with the working deformations during pressure measurement, while a transitional characteristic of the sensor may differ from normal by up to 60 %. Our research shows that it is possible, when enabling radial thermal deformation, synchronized with the membrane of the sensor's casing, in the region of coupling with the membrane, to minimize thermal stresses in it. In addition, by minimizing the heat transfer along the perimeter of the sensor's membrane it is possible to eliminate the gradient of a temperature field along the radius. This is the way to minimize a thermal deflection of the membrane and decrease a temperature error of the sensor. Employing such measures may substantially reduce the influence of a fast-changing temperature on metrological characteristics of the sensor.
Highlights
A whole series of technological processes require pressure sensors that can work under conditions of fast-changing thermal influences with significant amplitudes [1,2,3,4]
The theoretical study conducted is of practical importance as it opens up ways for the non-stationary thermal influences, which would imply rapid adjustment of the temperature component of measurement results
We have obtained analytical dependences that describe a non-stationary temperature field in the membrane and cylindrical casing of the tensoresistive pressure sensor, which make it possible to analyze the character of the field and detect its patterns depending on specific parameters of the membrane and the casing
Summary
A whole series of technological processes require pressure sensors that can work under conditions of fast-changing thermal influences with significant amplitudes [1,2,3,4]. This is achieved through the use of a specialized technology for the formation of a tensoresistive structure and specially designed mechanical structure of the sensor It is unclear, whether a given solution would be effective for a lasting and non-stationary temperature; remains unexplained is the issue on dependence of metrological characteristics of the sensor on thermal influence. This system uses a high-precision temperature sensor and a digital circuit to provide temperature compensation Such a method makes it possible to significantly influence the accuracy of pressure measurements under conditions of thermal influence, but it is completely ineffective when it is necessary to compensate for the implications of non-stationary thermal influence. It is still not understood the way the mentioned processes that occur at a fast-changing temperature may affect the static and dynamic characteristics
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