Abstract
Epitaxial a-axis oriented YBa 2Cu 3O 7−δ (YBCO) superconducting thin films have been grown by off-axis magnetron sputtering on Y 2O 3/YSZ/Si substrates with PrBa 2Cu 3O 7−δ (PBCO) seed layer. The YBCO thin films were deposited immediately after the on-axis magnetron sputtering of PBCO. XRD analyses show that the a-axis volume fraction for 120 nm thick YBCO films varies with substrate temperature during PBCO deposition and its maximum value is higher than 98%. The TEM study shows the clear dependence between the character of the R- T dependence and the microstructure of our YBCO thin films, which varies with the change of the volume ratio of a-axis to c-maxis oriented YBCO.
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