Abstract
New surface-analysis apparatus and techniques have been developed which are based on a micro-electron beam. The spatial resolution of the ultra-high vacuum scanning electron microscope is about 100 Å and micro-probe reflection high-energy electron diffraction patterns can be obtained. Diffraction patterns of either Auger electrons or quasi-elastically back-scattered electrons from the probed micro-domain can be measured in combination with a specially developed “constant take-off angle electron energy analyzer”. These diffraction techniques can be used for the determination of surface structures of a region as small as 0.1 × 1 μm 2. These techniques are called μ-probe Auger electron diffraction and μ-probe grazing-incidence back-scattering medium energy electron diffraction. Study of In/Si(111) surfaces by these techniques is introduced.
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