Study of preparation and characteristics of transition metal-doped ZnO: Li thin films deposited by magnetron co-sputtering*

Abstract

The metals (Co, Cu) -doped ZnO: Li films are prepared on Si (100) by using the magnetron co-sputtering method. Using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM) and vibrating sample magnetometer (VSM), the structure, surface morphology and magnetic properties of the films are measured. All the samples show room temperature ferromagnetism. The saturation magnetization intensity increases from 3.67 emu/cm3 to 5.78 emu/cm3, and the coercive force increases from 70Oe to 82Oe after annealing for Co-doped ZnO: Li films. The magnetism does not significantly change before and after annealing for Cu-doped ZnO: Li films.