STUDY OF PMN-PT THICK FILMS FABRICATED BY SPIN-COATING

Abstract

Having high dielectric constants and large mechanical strain, relaxor materials are attractive to the application of actuators in electromechanical systems and elements for large and bright display of optical image where the lower operation voltage and larger deformation are required. In this paper, we study the dielectric properties of 0.9PMN-0.1PT thick films fabricated by a spin coating method. The thick film is prepared for the application of large and bright display elements of an optical-image. In this application a layer of PMN-PT is filled in a mold. The thickness of the layer in the device should be in tens or hundreds of micrometers. Therefore, we used spin-coading technique to make PMN-PT thick films. The thickness of the films fabricated with this method ranges from 70mm to 100mm which are suitable to this application. The samples were electroded with silver print and characterized by dielectric constant and loss measurements. The experimental results show that the dielectric loss is less than 2 percent and the dielectric constant is greater than 10 at the room temperature in the frequency ranging from 100Hz to 1.0 MHz. A comparison of the results with those of PZT thick films manufactured with the same method is also presented.