Study of melt-grown GaAsN and InGaAsN epitaxial layers

Abstract

This paper presents investigation of electronic transport properties of GaAsN and InGaAsN epitaxial layers with low nitrogen content, the so called dilute nitrides, grown by liquid-phase epitaxy (LPE). The layers up to 2 microns thick have been grown from Ga- and In-rich melt at different initial epitaxy temperatures in the range 660–620 °C. Polycrystalline GaN has been used as a source for nitrogen. As grown, unintentionally doped GaAsN and InGaNAs are n-type with free carrier concentrations one order of magnitude higher than those for the reference nitrogen free undoped GaAs and InGaAs layers. Lattice matched to GaAs substrate InGaAsN layers exhibit Hall mobility values higher than 2000 V/cm2.s