Abstract
Choosing a suitable temperature coefficient of frequency (TCF) and turnover temperature (TOT) of quartz substrate for surface acoustic wave (SAW) resonators is extremely important in designing a highly stable SAW oscillator. In general, TCF and TOT depend on the cut angle of the substrate, the wave propagation direction and the metal thickness of the electrodes. The temperature characteristics of quartz substrates were studied experimentally by investigating high-Q one-port SAW resonators. The substrates covered from Y32/spl deg/-X to Y37/spl deg/-X and ST-X. The metal thickness of electrodes covered 1.8%, 3.6% and 5.4%.
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