Design of heterostructure one-port SAW resonator with improved bandwidth using Si and LiNbO3 layer

Abstract

In this research work, we have designed a heterostructure one-port surface acoustic wave (SAW) resonator. The multi-layer one port SAW resonator is made of a silicon (Si) substrate as base material, 128 ͦ rotated Y-cut X- propagated lithium niobate (LiNbO3) as piezoelectric substrate, and Inter Digital Transducers (IDTs) made of aluminium. This model is designed to operate on a wide frequency of 4–5 GHz with a resonance frequency of 4.74 GHz. Various parameters are taken into consideration during the study and analysis such as high-quality factor, wider bandwidth, better electromechanical coupling coefficient, and a true Figure of merit (FoM). The obtained Quality factor and the electromechanical coupling coefficient (k2) of the designed model are 2700 and 0.18. By using the wide range of frequencies, the bandwidth for the designed model is 1.74 MHz. The obtained results show that the device’s performance of the one port multilayer SAW resonator using the Al/128°YXLiNbO3/Si multi-layered substrate exhibits a commercial application in the 5 G wireless communication system.