Abstract
Air bubble trapping characteristics in the cavity are numerically analyzed in dispensing based ultraviolet – nanoimprint lithography (UV-NIL). This air trapping mechanism in the cavity is investigated by numerical method based on a squeeze model. Air bubble volume in the stamp cavity is calculated for various imprinting velocities, contact angles, polymer thicknesses, and aspect ratios in order to find out how to reduce trapped air. Predicted results show that imprinting velocity is a key parameter reducing the air bubble volume. Contact angles between stamp, substrate, and polymer also affect the reduction of air bubble. However, a different tendency is observed with the polymer thickness at each aspect ratio against our expectations.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call