Abstract
A comprehensive study on the hydrogen (H2) gas sensing performance of a novel chemoresistive gas sensor is presented in this work. This sensor is synthesized by an In-Zn-O (IZO) thin film and palladium nanoparticles (Pd NPs) on a sapphire (Al2O3) substrate. The relevant elemental, compositional, and chemical state properties are systematically investigated for the fabricated Pd NP/IZO sensor. The use of Pd NPs effectively enhances the surface area to volume (SA/V) ratio and related catalytic capability. This significantly improves the hydrogen sensing characteristics. In the experiment, the produced sensor achieves a higher sensing response SR of 1.59×104 under 1 % H2/air gas and a lower detectable content of 100 ppb H2/air at 250 °C. Importantly, the fabricated sensor reveals promised selectivity, reproducibility, and long-term (90 days) durability towards H2 gas. Therefore, the studied sensor offers a prominent choice for H2 gas detection.
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