Study and Realization of Camera Wafer Image Fusion Algorithm

Abstract

Image mosaics not only can make the collected several original images regenerate a complete image, but also can correct the error caused by imaging distortion of the original images, which can achieve the objective of rapid and correct mosaic image. The program studies the image mosaics of wafer defect inspection system. For the problem that the field range taken by CCD camera under resolution of wafer defect inspection system is small, which cant get the whole wafer image once and influences the extraction of subsequent defect features, the study demands to add image mosaics to the system.