Abstract
The polycrystalline thin films were deposited on glass substrate at room temperature by pulsed laser deposition PLD technique. The effects of annealing treatment by used the Oil Thermal Annealing (OTA) process on the structural, optical and electrical properties of ZnO thin film films were investigated. The film structure was investigated by X-ray diffraction to indicate that the heat treatment after the OTA process gives the optimized condition of crystalline. The transmission spectrum of the film was measured by UV-V is spectrophotometer, and the Urbach energy and forbidden band width were calculated. The surface topography of the film was observed by scanning electron microscopy (SEM) image of the ZnO thin film at the OTA process shows the changes in the shape and size of the grains. The atomic force microscopy (AFM) effect of heat treatment was demonstrated by the change in the surface roughness of the ZnO thin film. The electrical properties of thin film were optioned by Hall Effect technique. That these improvements in the ZnO thin film physical properties were annealing temperatures by OTA at 150 °C, 200 °C, 250 °C and 300 °C.
Highlights
Zinc oxide is a binding energy semiconductor n-type with a direct bandgap of about (3.37 eV) and has interesting optical and electrical properties at room temperature It has been shown that ZnO thin films possess good electrical conductivity and high optical transmittance [1, 2]
The surface topography of the film was observed by scanning electron microscopy (SEM) image of the ZnO thin film at the Oil Thermal Annealing (OTA) process shows the changes in the shape and size of the grains
Physical properties study of ZnO polycrystalline thin films prepared by Pulsed laser deposition (PLD) technique, which are morphological, structural, optical and electrical
Summary
Zinc oxide is a binding energy semiconductor n-type with a direct bandgap of about (3.37 eV) and has interesting optical and electrical properties at room temperature It has been shown that ZnO thin films possess good electrical conductivity and high optical transmittance [1, 2]. Previous experiments have found that the physical properties of the ZnO thin film change significantly during the deposition process as well as the heat treatment. Physical properties such as structural, morphological, optical, and electrical are closely related to the preparation conditions and heat treatment [13,14,15,16,17,18]. The experiments in the previous studies showed that heat treatment has an important role in improving the optical and structural properties of ZnO thin films [19]. The heat treatment parameters were changed and verified to improve the physical properties of the ZnO thin film
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