Abstract
LTCC material is introduced as an excellent alternative to silicon, glass or plastic materials for the fabrication of miniaturised analytical devices, though it is most widely used in the automotive industry and microwave industry. Laser ablation of LTCC material was studied in this report. This kind of green tape material is mechanised by excimer laser (KrF, 248 nm) and UV laser (Nd:YAG, 355 nm) and, for the first time, by infrared laser (1,090 nm). The optical photos and the SEM photos of the LTCC ablated by different kinds of laser sources are given in this paper. For the first time, we discuss the laser ablation of LTCC by optical fibre sources. When using the excimer laser, the tapered structure can be easily seen from the SEM photo. However, a kind of clear and perfect ablation of LTCC can be seen for the first time by the 1,090-nm infrared laser ablation.
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