Abstract
A method of buried cavity fabrication in low loss DP951 and new DP9K7 LTCC (low-temperature co-fired ceramic) materials is described in this paper. Laser micromachining and method based on sacrificial volume material (SVM) are studied. Cavities are fabricated in LTCC materials using two different SVMs—cetyl alcohol and carbon tape. The influence of laser system parameters on cutting quality of the LTCC materials is studied. Moreover, thermal properties of the LTCCs and used SVMs are analyzed using combined thermo-gravimetric analysis, differential thermal analysis and differential thermo-gravimetry. Geometries of the LTCC test structures fabricated using different SVMs are analyzed using a scanning electron microscope and x-ray tomography. Energy dispersive spectroscopy and surface wettability measurements are used to analyze changes in LTCC materials atomic composition after co-firing with SVMs.
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