Abstract
Features of self-organized steps and terraces present in SrTiO3 (001) substrates with various inclined angles (α) have been investigated by atomic force microscopy (AFM). The details of the shape of step edges, the direction of the straight step edges, the distribution of step heights and terrace widths are described. The existence of various step heights such as single, double and triple heights are observed in the self-organized substrates. The surface after the self-organization conserves the same ratio of the step height and terrace width as that before the self-organization. The features of the self-organized steps and terraces, as well as the relative amount of step interaction energy required to influence the formation of the self-organized surface structure are discussed theoretically.
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