Abstract
Abstract The properties of polymer-like amorphous hydrogenated carbon thin films with low defect density have been studied. These films were implanted with carbon ions with a dose range of 1012–1016 cm−2. The purpose of the study is to investigate the effects of ion beam damage on this type of film. Optical absorption measurements observe a narrowing of the optical band gap, suggesting the introduction of a large number of defect states subsequent to the implantation resulting in the broadening of the band tails, only after a threshold ion dose of 1015 cm−2. Nuclear reaction analysis suggests also a reduction in the hydrogen content of the film which coincides with film thinning.
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