Abstract
In Pb(Zr0.4Ti0.6)O3 (PZT) (110-nm-thick) films grown on (001)-oriented LaNiO3 (LNO) (50-nm-thick)/Si(001) films by pulsed laser deposition, the microstructures and various structural properties of the PZT and the underlying LNO films were comparatively studied mainly using synchrotron x-ray scattering experiments. Basically, the PZT films resembled the LNO films in microstructure, crystal orientation, and mosaic distribution. The PZT films, however, showed an isotropic structural order (in- and out-of-plane coherence lengths: 18 and 14 nm) in contrast to the anisotropic order of the LNO films (in- and out-of-plane coherence lengths: 5 and 30 nm). The PZT/LNO/Si systems displayed a good hysteresis characteristic (remanent polarization, 11.8 μC/cm2; coercive field, 36.1 kV/cm). We confirmed that oriented PZT films with reasonable ferroelectric properties can be successfully prepared on properly textured LNO films at a relatively low processing temperature.
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