Abstract

Pd/V multilayered structures are produced by the sequential deposition of palladium and vanadium with two electron-beam guns in a UHV system. The crystallographic structure of the layered samples is analysed by the θ–2θ X-ray diffraction technique. The measured X-ray diffraction spectra show the peaks characteristic of superiattices. The structure of the samples is studied using a statistical model of the superlattice structure. Typical structural parameters of the Pd/V superlattices (the unit cell composition, the standard deviation of the numbers of monolayers in the unit cell, the grain thickness, the standard deviation of the grain thickness, the interface thickness) are estimated by a comparison of numerically simulated X-ray diffraction spectra with experimental spectra.

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