Abstract
The results of structure research of thin-film nickel-carbon hydrogenated composites formed by the method of the combination of plasma-enhanced chemical vapor deposition of carbon from mixture of reactive gases (Ar + CH4) and physical sputtering of the nickel target are presented. It has been established in the study of composites by transmission electron microscopy that the microstructure of thin-film composites changed from fragmenting columnar to finely dispersed with increase in carbon concentration.
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