Abstract
A new experimental method to produce the compound by the use of reaction between vacuum evaporated film and ultrafine particles has been used for the system of Mg ultrafine particle and SiO film. In addition to the MgO particle, the enstatite phase (MgSiO 3) was produced by heating at 450–700°C. The growth of the MgSiO 3 phase has been discussed due to the movement of the Mg atom into the amorphous SiO film.
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