Abstract
A series of hydrogenated amorphous carbon (a-C:H) films doped with molybdenum disulfide (MoS2) were deposited by medium frequency unbalanced magnetron sputtering with mixed Ar/CH4 gases of different volume ratios as the source gases. The effects of Ar/CH4 ratio on morphology, microstructure, mechanical, and tribological properties of the MoS2/a-C:H composite films were investigated. Results show that the content of MoS2 in the as-deposited films decreases with the decreasing Ar/CH4 ratio, and the highest Ar/CH4 ratio favors the formation of nanostructured films. Besides, the hardness and internal stress of the composite films first decrease and then increase with decreasing Ar/CH4 ratio. Furthermore, the film deposited at the highest Ar/CH4 ratio exhibits excellent antiwear ability in all test environments and shows promising potential as a solid lubricating film in aviation and space industries.
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