Abstract
Metal containing hydrogenated diamond-like carbon coatings (Me-DLC, Me = Al, Ti, or Nb) of 3 ± 0.2 μm thickness were deposited by a magnetron sputtering-RFPECVD hybrid process in an Ar/H2/C2H2 mixture. The composition and structure were investigated by Energy Dispersive X-ray Spectroscopy (EDS), X-ray Diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The residual stress was measured using the curvature method and nanoindentation was used to determine the hardness and the Young’s modulus. A Ball-on-disk tribometer was employed to investigate the frictional properties and sliding wear resistance of films. The results show that the properties depend on the nature and the Me content in the coatings. The doping of the DLC coatings leads to a decrease in hardness, Young’s modulus, and residual stresses. Wear rate of the films first decreases with intermediate Me contents and then increases for higher Me contents. Significant improvements in the friction coefficient on steel as well as in the wear rate are observed for all Al-DLC coatings, and, concerning the friction coefficient, the lowest value is measured at 0.04 as compared to 0.07 for the undoped DLC.
Highlights
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with sp2 -bonded clusters interconnected by a random network of sp3 -bonded atomic sites [1]
metal-containing hydrogenated diamond-like carbon coatings (Me-DLC) coatings coatings is controlled controlled by the variation variation of the the metallic metallic target current
Me-containing DLC (Me = Al, Ti, or Nb) coatings were deposited by a hybrid process combining magnetron sputtering with PECVD in Ar/H2/C2H2 mixture
Summary
Diamond-like carbon (DLC) is a metastable form of amorphous carbon with sp2 -bonded clusters interconnected by a random network of sp3 -bonded atomic sites [1]. The properties of such coatings are directly related to the hybridization state of carbon bonds and the hydrogen content. The high compressive stress, which limits the thickness of coatings, represents a main disadvantage of DLC coatings.
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
