Abstract
High quality tetrahedral amorphous carbon films (ta-C) have been prepared on silicon and M2 steel substrate by filtered cathodic vacuum arc deposition. The structures, mechanical properties, adhesion and wear resistance of the tetrahedral amorphous carbon films have been investigated. The hardness and elastic modulus of the tetrahedral amorphous carbon films are determined by nano-indentation tests. The results show that the hardness and elastic modulus of the tetrahedral amorphous carbon films are 79 and 431 GPa, respectively. The friction performance of the tetrahedral amorphous carbon films was also studied. The coefficient of tetrahedral amorphous carbon film on substrate of M2 steel is 0.20, and stable up to 2500 cycles and the wear rate of tetrahedral amorphous carbon film is 1.233 × 10 −8 mm 3/N m for an applied load of 5 N and 2500 cycles.
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