Abstract
A novel methodology is developed that uses a combination of high energy ion scattering, x-ray reflectivity, and small angle neutron scattering to characterize the structure and properties of porous thin films. Ion scattering is used to determine the elemental composition of the film for absolute intensity calibration of the x-ray and neutron scattering techniques. X-ray reflectivity is used to measure the average electron density and film thickness. Small angle neutron scattering is used to determine the pore size, structure, and connectivity. Combining information from all three techniques, the film porosity and matrax material density can be uniquely determined.
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