Abstract
Amorphous chalcogenide thin films of Ge25S75 composition have been deposited by spin-coating technique. Optical properties of thin films were investigated by spectroscopic ellipsometry in UV-MIR spectral range. Obtained results prove increase of thin films refractive index in the transparent region and decrease of their thickness with increasing annealing temperature implying densification of the glass structure. Short wavelength absorption edge is shifting to lower energies (red shift) with increasing annealing temperature. Decreasing organic molecules content with increasing temperature of annealing was observed in MIR part of extinction coefficient and verified by Raman spectroscopy and EDS. Raman spectra also gave evidence of thermo-induced structural polymerization and decomposition of organic salts molecules yielding thin films with structure similar to the structure of the source bulk glass.
Highlights
Chalcogenide glasses (ChGs) are promising semiconductor optical materials exhibiting high values of refractive index and wide IR transparency
We present a study of non-toxic Ge25S75 thin films prepared by spin-coating method with specular optical quality
Spin-coated thin films deposited onto microscopic soda-lime glass slides were investigated using spectroscopic ellipsometry (SE)
Summary
Chalcogenide glasses (ChGs) are promising semiconductor optical materials exhibiting high values of refractive index and wide IR transparency. Because the solution based depositions are usually carried out under normal pressure the production is significantly cheaper as there is no need for high vacuum equipment. Germanium-based spin-coated thin films of Ge23Sb7S70 glass composition were successfully prepared [20], but further study of other germanium-based systems is needed to obtain plurality of different non-toxic optical materials prepared by solution based deposition techniques. We present a study of non-toxic Ge25S75 thin films prepared by spin-coating method with specular optical quality. The structure of source bulk glass, spin-coated thin films and pure BA solvent was determined using FT IR spectrometer IFS55 equipped with Raman module FRA106 (Bruker) with excitation by Nd:YAG laser (1064 nm). The Raman spectra were normalized by intensity of the most intense band in the spectrum
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