Abstract

Nanoparticulate WO3 films were prepared using microwave plasma synthesis and studied with respectto the electrical conductivity in dependence of ambient conditions. TheWO3 films with a monoclinic structure were made from cluster-assemblednanoparticles (diameter 3 nm) by means of dispersion and spin-coating. Above100 °C a thermally activated decrease of the electrical resistance due to oxygenvacancy donors is found. A reversible increase of the electrical resistanceR due to oxygen uptake is observed. The decrease ofR in responseto reducing H2S in the ppm range is studied in dependence of temperature and pre-annealing conditions.

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