Abstract
Pt/Na0.5Bi0.5TiO3/La0.5Sr0.5CoO3 (Pt/NBT/LSCO) ferroelectric capacitors were fabricated on (110) SrTiO3 substrate. Both NBT and LSCO films were epitaxially grown on the (110) SrTiO3 substrate. It was found that the leakage current density of the Pt/NBT/LSCO capacitor is favorable to ohmic conduction behavior when the applied electric fields are lower than 60 kV/cm, and bulk-limited space charge-limited conduction takes place when the applied electric fields are higher than 60 kV/cm. The Pt/NBT/LSCO capacitor possesses good fatigue resistance and retention, as well as ferroelectric properties with Pr = 35 μC/cm2. The ferroelectric properties of the Pt/NBT/LSCO capacitor can be modulated by ultraviolet light. The effective polarization, ΔP, was reduced and the maximum polarization Pmax was increased for the Pt/NBT/LSCO capacitor when under ultraviolet light, which can be attributed to the increased leakage current density and non-reversible polarization P^ caused by the photo-generated carriers.
Highlights
Ferroelectric films are widely used in microelectromechanical systems, sensors and ferroelectric random access memory (FeRAM) due to their excellent dielectric, ferroelectric and piezoelectric properties [1,2,3,4,5]
(110) peak, (110) diffraction peaks of Na0.5 Bi0.5 TiO3 (NBT) and La0.5 Sr0.5 CoO3 (LSCO) are observed without any diffraction peaks from other directions, indicating that both NBT and LSCO films are highly (110) oriented
The full width at half maximum (FWHM) of the (110) diffraction peak for NBT film is 0.301◦ based on the rocking curve in Figure 1b, indicating high crystal quality
Summary
Ferroelectric films are widely used in microelectromechanical systems, sensors and ferroelectric random access memory (FeRAM) due to their excellent dielectric, ferroelectric and piezoelectric properties [1,2,3,4,5]. (111) oriented NBT film prepared on Pt/Ti/SiO2 /Si substrate shows a higher Pr of 20.9 μC/cm2 [13]. NBT films fabricated on Pt-coated MgO and SrTiO3 substrates by pulsed laser deposition have good dielectric and ferroelectric properties [14,15]. Both Pr and EC are dependent on the crystal orientation. The electrode materials are very important for ferroelectric capacitors. Pt/NBT/LSCO ferroelectric capacitors were fabricated on (110)-oriented STO substrate by magnetron sputtering and pulsed laser deposition with LSCO as the bottom electrode. The microstructure and electrical properties of the Pt/NBT/LSCO ferroelectric capacitors, as well as the effect of ultraviolet light on the ferroelectric properties of these capacitors, were investigated
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