Abstract
Polycrystalline Sr 0.8La 0.1Bi 2.1Ta 2O 9 (SLBT), Sr 0.8Bi 2.2Ta 1.5Nb 0.5O 9 (SBTN), Sr 0.8La 0.1Bi 2.1Ta 1.5Nb 0.5O 9 (SLBTN) were fabricated on Pt/Ti/SiO 2/Si substrates by metalorganic decomposition. Well-saturated hysteresis loops with remanent polarization (2 P r) around 24 μC/cm 2 and coercive field (2 E c) around 112 kV/cm are obtained on Pt/SLBTN/Pt capacitors. Imprints, shifts of hysteresis loops along the voltage axis, are observed after heat treatment of poled Pt/SLBTN/Pt capacitors. Pt/SLBTN/Pt capacitors show excellent fatigue resistance with no polarization reduction up to 10 9 switches. The dc leakage current density of Pt/SLBTN/Pt capacitors is in the order of 10 −8 A/cm 2 below 100 kV/cm. These results indicate that the La 3+ and Nb 5+ co-modification is an effective way to improve the ferroelectric properties of Sr 0.8Bi 2.2Ta 2O 9 (SBT) thin films.
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