Abstract
Polycrystalline Bi3.15Nd0.85Ti3O12 (BNdT) ferroelectric thin films were deposited on platinized Si substrates by chemical solution deposition. Dense and uniform BNdT films with pure Bi-layered perovskite structure were achieved by rapid thermal annealing the spin-on films at 700 °C for 3 min. Well-saturated hysteresis loops with remanent polarization around 10 μC/cm2 were obtained on Pt/BNdT/Pt capacitors. Typical values of dielectric constant and loss tangent of BNdT films at 10 kHz were 525 and 0.028, respectively. Curie temperature of BNdT films was determined to be around 450 °C from temperature dependent dielectric measurement. Pt/BNdT/Pt capacitors showed excellent fatigue resistance with no polarization reduction up to 1010 switches. Imprints, shifts of hysteresis loops along voltage axis, were observed along with the loss of retained polarization after heat treatment of poled Pt/BNdT/Pt capacitors. However, data loss due to imprint is negligible for BNdT capacitors. The dc leakage current density of BNdT capacitors is in the order of 10−7–10−6 A/cm2 below 100 kV/cm.
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