Abstract
A PtRu alloy thin-film used for catalytic electrodes of fuel cells was fabricated by ion beam sputtering(IBS).The structure,surface layer structure,chemical composition,surface chemical state,and morphology of the PtRu alloy thin-film were characterized using X-ray diffraction(XRD),grazing incidence X-ray diffraction(GIXD),X-ray photoelectron spectroscopy(XPS),and atomic force microscopy(AFM).It was shown that the surface chemical state and structure in the top layer(from 15-40 nm)of PtRu alloy thin-film were changed due to the strong interaction between Pt+ and Ru+ during the ion beam sputtering deposition process,which also affected the catalytic activity of the PtRu alloy thin-film.In particular,when the atomic ratio of xPt/xRu was 0.64,enrichment of the Ru solid solution and amorphous phase Pt39Ru61 were observed on the surface layer of PtRu alloy thin-film.
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