Abstract
This study focusses on the investigation of RF power variations (100–300W) effects on structural, morphological and optical properties of CaCu3Ti4O12 thin film deposited on ITO/glass substrate in a non-reactive atmosphere (Ar). The increase of RF power from 100W to 300W led to evolution of (112), (022), (033), and (224) of CCTO XRD peaks. The results indicated that all the films were polycrystalline nature with cubic structure. The crystallite size increased from 20nm to 25nm with increasing RF power. FESEM revealed that the films deposited were uniform, porous with granular form, while the grain size increased from 30 to 50nm. AFM analysis confirmed the increment in surface roughness from 1.6 to 2.3nm with increasing film grain size. Besides, optical transmittance values decreased to minimum 70% with increasing RF power while optical energy bandgap increased from 3.20eV to 3.44eV. Therefore, favorable CCTO thin film properties can be possibly obtained for certain application by controlling RF magnetron sputtering power.
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