Abstract
The changes in the structure of reactive pulsed laser-deposited (RPLD) CNx films with nitrogen content from 3.6–22 at% have been investigated by X-ray diffraction, X-ray photoelectron spectroscopy (XPS) and Fourier transform–infrared (FT–IR) absorption. The films were found to be amorphous, and to consist of a network of rings. The rings that were composed solely of carbon atoms gave rise to an XPS peak located between 284.3 and 284.8 eV (C1 component). The rings containing nitrogen led to another peak located between 285.5 and 286.4 eV (C2 component). When the nitrogen content increased, the relative intensity of the C1 component fell, while that of the C2 component rose, indicating that some carbon atoms in the rings were replaced by nitrogen atoms. C≡N bonds also contributed to the C2 component. The FT–IR data were consistent with this interpretation. No evidence for the existence of a β-C3N4 phase was found in RPLD CNx films.
Published Version
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