Structural-phase transformations at annealing of highly reflective mirrors based on aluminum and silver

Abstract

Multilayered prototypes of Al and Ag total reflection mirrors with a protective coating of amorphous ZrO2 oxide were analyzed using transmission electron (cross-sectional method), optical, and scanning (with electron probe microanalysis) microscopes. The prototypes’ reflectivity was measured by the recording of reflection spectra in the wavelength range 200–1100 nm. The structure of the mirrors was studied by X-ray diffraction reflection. High temperature annealing (8 h) did not change the stoichiometric composition of the protective coating. The reflectivity of the Al mirrors in the wavelength range 700–1100 nm and the Ag mirrors in the wavelength range of 500–1100 nm remained unchanged in spite of recrystallization of the polycrystalline metal films and the incipient process of amorphous ZrO2 crystallization. The mass of the crystalline oxide after annealing was several percent of the total amorphous oxide mass. At the same time annealing led to the occurrence of local voids on the aluminum/upper oxide interface. Such defects were not observed on the Ag mirrors. As a whole, the Ag mirrors turned out to be more stable to heating as compared to those made of Al.