Structural Optimization of Capacitive MEMS Microwave Power Sensor

Abstract

In this work, a pivoted mechanical model of capacitive MEMS microwave power sensor is established to optimize the relative position of the measuring electrode. The pivoted model is divided into four sections in order to more accurately study the vibration of the cantilever beam. The model of the sensitivity and the overload power are obtained. According to the established model, the structure of the sensor is analyzed and optimized, the relationship of the sensitivity and the overload power with the relative position of the measuring electrode is obtained. ${x}_{3}/{l}=0.9$ is the optimal solution for the overload power, ${x}_{3}/{l}=0.8$ is the optimal solution for the sensitivity, and ${x}_{3}/{l}=0.5$ is taken as the trade-off value to verify the accuracy of the model. Finally, the measured results show that this work has certain reference value and guiding significance for capacitive MEMS power sensors.