Abstract
This paper presents a new phase-locked loop structure based on a power combiner and a capacitive MEMS microwave power sensor. Modelling in computer-aided equivalent circuit form and simulation in ADS are conducted to verify its feasibility. The power combiner is composed of cascaded two sections of ACPSs for broadband performance. The measured return loss is less than −17.1 dB over X-band. The capacitive MEMS microwave power sensor can convert the power into a capacitive change. Its detection sensitivity at 10 GHz is 11.1 aF/mW. In the phase-locked loop model, the capacitive MEMS power sensor is inserted into a voltage-controlled oscillator (VCO) circuit. The VCO output frequency is controlled by the capacitive change which is related to the phase difference of the signals injected into the power combiner. A capture range of 10 GHz to 10.016 GHz is obtained through simulation.
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