Abstract
The high-power handling capacity of a capacitive microwave power sensor is investigated in this paper. Experiments show that the response of sensor is non-linear at high power levels. Based on the analysis and simulation, an electro-mechanical model is proposed to describe this characteristic. The presented model considers two effects:1) the mode shape of beam and 2) the signal reflection. The calculated results using this model are in good agreement with the measured ones. It indicates the non-linear response of capacitive power sensor under high-power signal is mainly caused by the impedance mismatching of the device.
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