Abstract
In this study, reactive magnetron sputtering was applied for preparing NbCN-Ag films with different Ag additions. Ag contents in the as-deposited NbCN-Ag films were achieved by adjusting Ag target power. The composition, microstructure, mechanical properties, and tribological properties were characterized using energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), high resolution transmission electron microscopy (HRTEM), Raman spectrometry, nano-indentation, and high-temperature sliding wear tests. Results indicated that face-centered cubic (fcc) NbN, hexagonal close-packed (hcp) NbN and fcc Ag, amorphous C and amorphous CNx phase co-existed in the as-deposited NbCN-Ag films. After doping with 2.0 at.% Ag, the hardness and elastic modulus reached a maximum value of 33 GPa and 340 GPa, respectively. Tribological properties were enhanced by adding Ag in NbCN-Ag films at room temperature. When the test temperature rose from 300 to 500 °C, the addition of Ag was found beneficial for the friction properties, showing a lowest friction coefficient of ~0.35 for NbCN-12.9 at.% Ag films at 500 °C. This was mainly attributed to the existence of AgOx, NbOx, and AgNbOx lubrication phases that acted as solid lubricants to modify the wear mechanism.
Highlights
Transition metal nitrides (TMN), owing to a good combination of mechanical and physical properties, have potential for diverse applications ranging from electronic and optoelectronic devices to aerospace structures
Ju et al [9] studied the tribological properties of NbN/Ag films and the results showed that the migration of Ag and the formation of the silver niobium oxide (AgNbO3 ) with layer-by-layer assembly of amorphous structure at high temperature were the main reasons for the reduction of friction coefficients of NbN/Ag films
A novel NbCN-Ag film was successfully deposited onto 304 stainless steel and Si
Summary
Transition metal nitrides (TMN), owing to a good combination of mechanical and physical properties, have potential for diverse applications ranging from electronic and optoelectronic devices to aerospace structures. NbN based films have been widely used in the field of microelectronics [1,2]. Due to their high hardness, good toughness, and excellent corrosion resistance, NbN based films are most suitable for using as functional films, especially on the surface of mould and on cutting tools for surface modifications. These films have a high friction coefficient during application [3]. CrCN coating produced by the cathodic arc evaporation (CAE)
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