Abstract

X-ray photoelectron (XPS) and Raman spectroscopy were employed in the structural investigation of the modified polyimide films irradiated with boron ion beams. XPS discloses the formation of graphite bonding especially when irradiation comes up to a dose around 3×1016 B+/cm2. Raman spectroscopy, together with the calculation of its reduced spectra as well as the one-phonon state density of amorphous graphite, is inclined to demonstrate a structural similarity between modified polyimide films and amorphous graphite in short range order. The degree of this similarity depends on the irradiation condition. From this view point, the effects of dose and beam current density upon the final microstructures of the irradiated polyimide films were also investigated.

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