Abstract
Nanocrystalline silicon is considered one of the most promising materials for thin-film solar cells. For such an application, one of the critical issues yet unsolved is to obtain a good structural uniformity along the film growth direction to yield high fill factors and open-circuit voltages. In this article, Raman spectroscopy was used to obtain crystallinity in-depth profiles of samples grown at a high growth rate by low-energy plasma-enhanced chemical vapor deposition (PECVD) using different SiH 4 and H 2 fluxes, all yielding the same dilution factor. The results showed that the total flow rate strongly affects the structural uniformity of nanocrystalline silicon films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.