Abstract
The pure and Zr-doped BiFeO3 thin films were fabricated on Pt/TiO2/SiO2/Si substrates by sol-gel method. The microstructural characterization revealed a phase structural transition from rhombohedral structure to tetragonal structure in Zr-doped BiFeO3 thin films. Compared with pureBiFeO3 thin film, the Zr-doped BiFeO3 thin films showed better dielectric and leakage current characteristics. The mechanism associated with the enhancement of the electrical properties of the thin films is also discussed.
Published Version
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