Abstract
For structural engineering of vacuum-arc (TiAlSi)N coatings, nanosized multilayer composites (TiAlSi)N/MoN and (TiAlSi)N/ZrN were used. The studies were carried out using high-resolution transmission and scanning electron microscopy with energy dispersive microanalysis, precision XRD method, microindentation and scratch testing. From the obtained results it follows that the use of ultrathin (less than 10 nm) layers makes it possible to achieve a quasi-epitaxy effect in (TiAlSi)N/MoN and (TiAlSi)N/ZrN multilayer nanocomposites. This effect is accompanied by stabilization of the fcc (structural type of NaCl) crystal lattice in the layers and the predominant crystallite orientation bound along the boundary. In this case, it is possible to significantly reduce the droplet phase content in the coatings, increase the hardness to superhard state (38.7 GPa for the (TiAlSi)N/ZrN nanocomposite) and achieve high adhesive strength with a critical load in the fracture region of the coating of 174.82 N.
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