Abstract
For satisfying the requirement of the high speed and precision table in the chip packaging application, a high speed precision positioning table was designed. The table was driven directly by linear voice coil actuator in the direction of X, Y and Z separately. The simulation model of positioning table was set up. Dynamic optimization design of spring which is the critical component of flexible decoupling mechanism in positioning table was performed using the virtual prototyping technology. Match principle between spring rigidity and preload was analyzed. Method of combining the finite element analysis and the mechanical system design was used to design and analysis the flexible hinge. The prototype of positioning table was fabricated. Experimental results show that the precision positioning table achieves the design target and prove that the design theory is correct. (5 pages)
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