Structural characterization of C xB yN z ( x=0.1 to x=0.2) layers obtained by laser-driven synthesis

Abstract

C x B y N z layers have been prepared by laser-assisted chemical vapour deposition (CVD) in a gas atmosphere containing C 2H 4, B 2H 6 and NH 3 where the starting composition ratio could vary in a large range. The characterization of these C–B–N materials was made by XRD, EPMA, XPS, optical and scanning electron microscopy. The chemical composition of C–B–N layers tended to a composition C 1B 6N 3 on the line BN–‘B 3C’. The turbostratic structure of C–B–N layers could be influenced and modified as a function of composition. XPS investigations confirmed the single-phase nature and the existence of bonding between all the elements. Some planar structures, containing especially CB 2N groups, were suggested for the ‘unit cell’ of these C–B–N solid solutions, in agreement with EPMA and XPS analysis.