Abstract
Alkali-free aluminoborosilicate glass substrates possess excellent chemical stability and outstanding thermodynamic and dielectric properties, rendering them promising candidates for applications in three-dimensional integrated packaging. This study investigates the structural and performance variations in RO (RBa,Sr)–Al2O3–B2O3–SiO2 glass substrates with a mixed alkaline earth effect under different BaO/SrO ratios (with a constant RO value of 20 mol%). The glass substrates were analyzed using various methods, including X-ray diffraction, differential scanning calorimetry, coefficient of thermal expansion, Raman spectroscopy, and 1 MHz–1 GHz dielectric property tests. Raman spectroscopy was used to measure the glass network connectivity using R12/34 (degree of [SiO4] units depolymerization) and N4 (degree of [BO4] units polymerization). The results show that the RABS15 sample had a significant reduction in dielectric loss at a frequency of 1 GHz compared with the other glass samples, corresponding to the best glass network connectivity. The main cause of high-frequency dielectric loss was the presence of [BO3] units in the glass network. During the preparation process, it was discovered that placing the crucible with mixed raw materials in an elevator-type furnace at a high temperature is an effective measure for solving the crystallization problem.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call