Abstract
The composite nickel incorporated diamond-like carbon (Ni-DLC) thin films were produced by using RF-Sputtering and RF-Plasma enhanced chemical vapor deposition(RF-PECVD) from acetylene gas and nickel target in various RF powers. The structural and optical properties of thin films with increasing nickel content were investigated. X-Ray Diffraction (XRD) study shows completely an amorphous structure. The presence of Ni and carbon content were confirmed by Energy dispersive X-ray (EDX) Spectra. The optical band gap energy decreases from 4.58 to 3.66eV with increasing applied power. The Urbach energy displays a decreasing trend from 0.472 to 0.189eV. It is shown that the Ni content and the size of nanoparticles could be controlled by adjusting RF applied power.
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